While several companies have recently released thermoplastic versions of CMP pad conditioners, these new Organic Diamond Disks are made with an innovative thermally stable, stiff epoxy.
By using an epoxy base with partly metal-coated diamonds, the disks are lighter, and a wider range of abrasive particle types can be used.
nondiamond materials such as CBN are also possible with this design.
Because no metal is exposed to the surface, the disks are ideal for harsh extreme pH slurries, and a wider range of operating temperatures.
‘We are finding that when we speak with customers, our pricing is 20%, 30% or less than conventional electroplated disks out in the marketplace’.
‘Our disks also have the benefit of fixed placement grid-pattern diamonds, as well as optional oriented tips, to give predictable control over performance’.
‘They also have longer lifetimes, lower defectivity and superior uniformity results’.
‘Qualifying these disks is an easy decision for thin film and process engineers as well as fab managers’, stated ADS’ Product Manager.
The Organic Diamond Disk product line is an ideal complement to another newly release line of disks, Advanced Diamond Disk (ADD), which are environmentally friendly and made with pure polycrystalline diamond.
Organic Diamond Disks are now in full production, and are available for purchase at any volume requirement.