The new fast steering mirrors offer two-axis high bandwidth tip/tilt motion with microradian resolution over large angular ranges. Used in precision scanning, tracking, pointing, image stabilisation and beam stabilisation applications, fast steering mirrors improve the performance of optical systems in semiconductor inspection, lithography, and memory repair, laser-to-fibre coupling, free-space optical communications, marking and micro-machining, bio-medical instrumentation, and imaging and display systems.

Based on proven aerospace technology, the new fast steering mirrors utilise a patented flexure suspension for start-up friction-free rotation around a single pivot point, located on or near the surface of the mirror.

The unique concept allows for up to ( 50 mrad angular range, large sized optics with up to 100 mm diameter, and angular noise as low as 1 ærad RMS.

Four voice coil actuators work as push-pull pairs to deliver fast rotations with an angular acceleration of up to 8.000 rad/sý.

Integrated control electronics provide position readout and external control voltage input for up to 3 kHz closed loop control.

Equipped with an external position-sensing detector, an FSM can quickly lock onto the detector for rapid laser beam control and stabilisation.

Compared to dual XY galvanometric scanners, the Newport Fast steering mirrors offer a far more compact package.

They eliminate the need to displace the beam to accommodate a second galvanometer, or to compensate for polarisation rotation due to an extra reflection.

They also enable larger apertures, improved efficiency, and lower wave front distortion than typical dual XY galvanometers.